Journal
Scientific and Technical Journal of Information Technologies, Mechanics and Optics
UDK539.211, 539.25
Issue:5 (135)
Download PDF0 Kbyte
Kinetics of transformation of the atomic step bunches shape under electromigration conditions on the Si(001) surface
Annotation
The quality of the epitaxial structures is significantly influenced by both the initial surface morphology and its transformation during growth. One of the phenomena of surface roughness of silicon occurring during annealing, growth, exposure to electric current, and adsorption of foreign material is the formation of step bunches. The paper presents experimental studies of the transformation kinetics of an atomic step bunches shape on the Si(001) surface that were carried out under electromigration conditions when heated by a constant electric current down the steps in the temperature range of 1000–1150 °С. The samples were annealed in an ultra-high vacuum chamber of a reflection electron microscope, followed by quenching to room temperature. The dependence of the average distance between steps on the number of the bunch steps was observed using an atomic force microscope under atmospheric conditions. It was found that the experimentally obtained dependence obeys a power law (l ∝ Nα), where α varies from –0.68 to –0.36. The study confirmed the change in the elastic interaction potential of steps in bunches with the increase in temperature. The results of the work advance understanding of a bunching process of Si(001) at elevated temperatures.
Keywords
Постоянный URL
Articles in current issue
- Features of images of water, ice, snow, objects and a human formed by a hybrid television camera in the near-infrared range
- Analyzing periodical textured silicon solar cells by the TCAD modeling
- Scintillation gamma radiation sensors based on solid-state photomultipliers in wireless industrial internet networks
- Improving the quality of network management of technological processes
- Geometric approach to the solution of the Dubins car problem in the formation of program trajectories
- Drift of two-dimensional vacancy islands on the Si(100) surface under electromigration conditions
- A study of the photocatalytic properties of chitosan-TiO2 composites for pyrene decomposition
- Abnormal diffusion profile of adatoms on extremely wide terraces of the Si(111) surface
- An experimental methodology for assessing the probability and danger of network attacks in automated systems
- A meta-feature selection method based on the Auto-sklearn framework
- Automatic construction of the dialog tree based on unmarked text corpora in Russian
- Generic programming with combinators and objects
- Machine learning of the Bayesian belief network as a tool for evaluating the process frequency on social network data
- Software restructuring models for object oriented programming languages using the fuzzy based clustering algorithm
- The concept of managing the network structure of intelligent devices in the digital transformation of the energy industry
- Protecting facial images from recognition on social media: solution methods and their perspective
- Redundant models of testable distributed real-time computing systems
- A study of the influence of the base thickness on photoelectric parameters of silicon solar cells with the new TCAD algorithms
- A balanced algorithm of the hybrid large-particle method and its verification on some test problems
- The architecture of a system for full-text search by speech data based on a global search index
- Assessment of cerebral circulation through an intact skull using imaging photoplethysmography